In the existing research on inchworm actuators, the way to realize clamping and release mainly depends on the deformation of laminated piezoelectric ceramics or the deformation of mechanical amplification mechanism actuated by laminated piezoelectric ceramics. Inchworm actuators have high thrust and high resolution, and utilizing the inchworm principle increases the stroke by accumulating paces of the actuator and can obtain very high resolution within one pace. However, the reaction force is proportional to the weight of vibrating mass, so this type of actuator is suitable for small dimension applications. These actuators have a simple structure and compact size. The inertial actuators are pushed by the reaction force generated from an unsymmetrical mass vibration system, which is formed by either an unsymmetrical structure or voltage excitation. The non-resonance piezoelectric actuators avoid high-frequency resonance, so it is suitable for both open-loop and closed-loop motion systems.Īmong non-resonance piezoelectric actuators, there are two main classes, inertial actuators and inchworm actuators. Consequently, a motion system actuated by resonance actuators always needs closed-loop control. However, the control strategy of resonance systems is complex since both the mechanical actuator and its power source exhibits high nonlinearity. The resonance actuators are fast and compact.

According to vibration state, they can be classified into resonance piezoelectric actuators and non-resonance piezoelectric actuators. This work provides a potential solution of piezoelectric motors for the wafer probe station.Īfter several decades of development, many piezoelectric actuators with different principles have been proposed. Due to characteristics like a fast response, high resolution, and long stroke, piezoelectric actuators have been applied in many areas, such as aeronautics and precision instrument.

Consequently, the demand for high speed, long travel stroke, and high-resolution motion servo systems becomes urgent. As the die size on the wafer decreases and the wafer diameter increases, the number of dies on a wafer increases significantly. To realize high efficient tests of wafers with hundreds of dies, the motion servo system needs to be fast, stable, and precise within a long travel range. Size: 22W x 120H x 75L mm (0.9W x 5H x 2.The wafer probe station is the key testing equipment for electrical performance measurement in the manufacturing process of integrated circuits.

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Piezo actuator close up